Usually the quality of commercial LiNbO{sub}3 (LN) wafers is checked by their crystalline homogeneity. In X cut wafers, which are labeled for optical waveguide applications, however, the existence of a significant change in the hydroxyl contentalong the polarized Z axis is found by Fourier transform IR (FTIR) spectrometry, although a corresponding inhomogeneity was not observed about the lattice parameters, the Li and Nb contents, and the optical birefringence parameters. Such a difference inhydroxyl content might influence quality and stability of the obtained waveguides, and one should consider this before designing waveguide devices and fabrication processes.
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