The optical analysis and design program RAYTRACE, which was developed at our institute, enablesthe simulation of micro-optical systems containing arrays of microlenses or other optical components.The most important features of the program are briefly described to show its broad application areas.A special simulation example showing the spot diagram and the intensity distribution in the focal planeof a simple Shack-Hartmann sensor with a diffractive microlens array for an incident aspherical waveis given.
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