Optical constants of beryllium thin layers determined from Mo/Be multilayers in spectral range 90 to 134 eV

Mewael Giday Sertsu; Andrey A. Sokolov; Nikolay I. ChkhaloVladimir N. PolkovnikovNikolay N. SalashchenkoMikhail V. SvechnikovFranz Schafers

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Optical constants of beryllium thin layers determined from Mo/Be multilayers in spectral range 90 to 134 eV

机译：Optical constants of beryllium thin layers determined from Mo/Be multilayers in spectral range 90 to 134 eV

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Mo/Be multilayers are promising optical elements for extreme ultraviolet (EUV) lithography and space optics. Experimentally derived optical constants are necessary for accurate and reliable design of beryllium-containing optical coatings. We report optical constants of beryllium derived from synchrotron radiation-based reflectivity data of Mo/Be multilayers. Results are in good agreement with available data in the literature obtained from the well-known absorption measurements of beryllium thin films or foils. We demonstrate synchrotron based at-wavelength reflectometry as an accurate and non-destructive technique for deriving EUV optical constants for materials that are difficult or unstable to make thin foils for absorption measurements.

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《Optical Engineering》 |2021年第4期|044103-1-044103-8|共8页
作者
Mewael Giday Sertsu; Andrey A. Sokolov; Nikolay I. ChkhaloVladimir N. PolkovnikovNikolay N. SalashchenkoMikhail V. SvechnikovFranz Schafers;
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作者单位

Helmholtz-Zentrum Berlin fur Materialien und Energie GmbH (Germany);

Institute for Physics of Microstructures Russian Academy of Sciences (Russia);

Institute for Physics of Microstructures Russian Academy of Sciences (Russian Federation);

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类计量学;
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Optical constants of beryllium thin layers determined from Mo/Be multilayers in spectral range 90 to 134 eV

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