Imaging quality analysis of a KBA x-ray microscope working at grazing incidence

Jiasheng Hu; Lingling Zhao; Xiang LiYuhong Bai

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Imaging quality analysis of a KBA x-ray microscope working at grazing incidence

机译：Imaging quality analysis of a KBA x-ray microscope working at grazing incidence

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摘要

In the last 20 years, x-ray imaging technology has developed to meet the needs of x-ray photoetching, spatial exploration, high-energy physics, and diagnosis of inertial confinement fusion. Because conventional imaging methods are not suitable in the x-ray range, grazing reflective imaging and coded aperture imaging methods have been adopted. In this paper, we describe the design of a noncoaxial grazing incidence KBA microscope. The microscope consists of two sets of spherical mirrors that scatter in orthogonal planes. An optical ray tracing program is used to analyze and evaluate the theoretical aberrations of the microscope. This allows us to optimize the x-ray imaging system. The analytical results provide a reliable foundation for determining the useful range and the manufacturing and assembly tolerances of the microscope.

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来源
《Optical Engineering》 |2006年第4期|046502-1-046502-7-0|共7页
作者
Jiasheng Hu; Lingling Zhao; Xiang LiYuhong Bai;
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作者单位

Dalian University of Technology School of Electronic and Information Engineering Dalian 116024, China;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
关键词
x-ray imaging; KBA microscope; aberration analysis; grazing reflective imaging; quality evaluation;

Imaging quality analysis of a KBA x-ray microscope working at grazing incidence

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