We have developed a thin quarter-wave plate (QWP) operating at low terahertz frequency of 0.51 THz by etching micro-grating on a silicon substrate. The grating period is 30 μm, and the etching depth is 156 μm. Stokes parameters are used to characterize the QWP. The QWP shows a high transmission coefficient of 0.93 and a low polarization dependent loss (PDL) of 1.4 dB at 0.51 THz.
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