Optical waveguide components with high refractive index difference in silicon-oxynitride for application in integrated optoelectronics

Bernd Schauwecker; Michael Arnold; Christian V. RadehausGeorges PrzyrembelBerndt Kuhlow

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Optical waveguide components with high refractive index difference in silicon-oxynitride for application in integrated optoelectronics

机译：Optical waveguide components with high refractive index difference in silicon-oxynitride for application in integrated optoelectronics

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摘要

Planar optical waveguide structures in communication network applications require a number of indispensable features, e.g., low insertion loss, efficient fiber-to-chip coupling, polarization independent operation, and high integration density, as well as reliable and cost-efficient fabrication. The presented concept of integrated optical waveguide structures is based on the high refractive index material system of silicon-oxynitride on silicon. This system has the potential to meet all mentioned requirements. We describe the design and fabrication of such waveguide structures and demonstrate basic integrated optical components with good performance.

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来源
《Optical Engineering》 |2002年第1期|237-243|共7页
作者
Bernd Schauwecker; Michael Arnold; Christian V. RadehausGeorges PrzyrembelBerndt Kuhlow;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
关键词
Planar waveguide; Integrated optical component; Waveguide component; Y-branch; Coupler; Mach-Zehnder interferometer; Silicon-oxynitride;

Optical waveguide components with high refractive index difference in silicon-oxynitride for application in integrated optoelectronics

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