High-accuracy small-angle measurement of the positioning error of a rotary table by using multiple-reflection optoelectronic methodology

Chun-Jen Chen; Psang Dain Lin

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High-accuracy small-angle measurement of the positioning error of a rotary table by using multiple-reflection optoelectronic methodology

机译：High-accuracy small-angle measurement of the positioning error of a rotary table by using multiple-reflection optoelectronic methodology

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摘要

To improve upon and provide a methodological alternative to published optoelectronic angle measurement systems, the paper performs high-accuracy angle measurement by use of laser diodes, dualaxis position sensing detectors, and a series of reflections between two first-surface mirrors. Measurement accuracy improves from 0.5 to 0.05 arc sec as the light ray is reflected back and forth several times between the mirrors. Analytic ray tracing is used to model the reflected light ray so as to determine the system equations implicitly in terms of the measured angles. The first-order Taylor series expansion provides a linear form of the system equations. To validate the system, a prototype is built. Calibration and stability experiments are performed. Experimental results show the resolution, accuracy, and measurement range are, respectively, 0.008, 0.05, and +-250 arc sec. Compared with traditional optical angle measurement systems, this method has many merits such as low cost, simple configuration, high sensitivity, and high linearity.

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来源
《Optical Engineering》 |2007年第11期|113604-1-113604-8-0|共8页
作者
Chun-Jen Chen; Psang Dain Lin;
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作者单位

National Cheng Kung University, Department of Mechanical Engineering, Tainan, Taiwan 70101;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
关键词
skew-ray tracing; small-angle measurement; high angular accuracy;

High-accuracy small-angle measurement of the positioning error of a rotary table by using multiple-reflection optoelectronic methodology

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