Displacement sensing HeNe laser with lambda/8 accuracy and self-calibration

Li Y.; Han YM.; Fu J.Guo N.Ou JM.Zhang SL.

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Displacement sensing HeNe laser with lambda/8 accuracy and self-calibration

机译：Displacement sensing HeNe laser with lambda/8 accuracy and self-calibration

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摘要

The novel principle for changing a single HeNe laser to a displacement sensor is presented and demonstrated. By inserting a birefringence element in laser cavity, we split a frequency of the laser light into two (o-light and e-light) with an orthogonal linear polarization and a tunable frequency difference. When one mirror of the laser is moved along the laser axis, the polarization of the output light of the laser changes periodically. Each period corresponds to both the lambda /2 displacement, by which the cavity mirror moves, and the variation of one longitudinal mode interval, by which the two frequencies drift. In each period, four different polarization states in the laser output (e-light, e-light and o-light, o-light, no-light) appear continuously. If the frequency difference and the cavity length are appreciated, each polarization state corresponds to both lambda /8 displacement of the mirror and the drift of the two frequencies by 1/4 longitudinal mode interval. Therefore, when a onetime change of the polarization is sensed by optoelectric detectors and circuits, we know that the mirror has moved by lambda /8, and by counting the number of occurrences of lambda /8 we can calculate the displacement of the mirror. We judge the direction of mirror movement by sensing the order of the four polarization states that appear. The moving mirror is attached to and moved with the object to be measured. This system reaches an accuracy of 0.079 mum, a measurement range of 8 mm, and a linearity of 0.0036%, and it has the function of self-calibration in accordance with laser wavelength. (C) 2000 Society of Photo-Optical instrumentation Engineers. [S0091-3286(00)01211-3]. [References: 9]

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来源
《Optical Engineering》 |2000年第11期|3039-3043|共5页
作者
Li Y.; Han YM.; Fu J.Guo N.Ou JM.Zhang SL.;
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作者单位

Tsing Hua Univ, State Key Lab Precis Measurement Technol & Instru, Beijing 100084, Peoples R China, .;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
关键词
He-ne laser; Frequency splitting; Displacement measurement; Cavity; Split;

Displacement sensing HeNe laser with lambda/8 accuracy and self-calibration

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