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机译:Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts
University of California, Berkeley, Berkeley, CA, USA;
Harvey Mudd College, Claremont, CA, USA;
TrellisWare Technologies, San Diego, CA, USANvidia, Santa Clara, CA, USADiDi Labs, Mountain View, CA, USA;
Tungsten; Relays; Micromechanical devices; Electric breakdown; Oxidation; Contact resistance; Electrodes;