A 64 × 64 SPAD-Based Indirect Time-of-Flight Image Sensor With 2-Tap Analog Pulse Counters

Byungchoul Park; Injun Park; Chanmin ParkWoojun ChoiYoondeok NaMyung-Jae LeeYoungcheol Chae

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A 64 × 64 SPAD-Based Indirect Time-of-Flight Image Sensor With 2-Tap Analog Pulse Counters

机译：A 64 × 64 SPAD-Based Indirect Time-of-Flight Image Sensor With 2-Tap Analog Pulse Counters

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This article presents a 64 inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" tex-math notation="LaTeX"$times $ /tex-math/inline-formula 64 indirect time-of-flight (iToF) image sensor with a depth range of 50 m, integrated into a 1P4M 110-nm CMOS process. The sensor is based on a single-photon avalanche diode (SPAD), the range-dependent phase delay of which is measured by compact analog time-gated pulse counters and then read out by column-parallel single-slope (SS) analog-to-digital converters (ADCs). We present two prototypes of iToF sensors that exploit one- or two-tap counters in the pixel. Compared to the one-tap sensor, the two-tap sensor achieves an improved fill factor of 26.3% with a pixel pitch of 32 inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" tex-math notation="LaTeX"$mu text {m}$ /tex-math/inline-formula. This improvement is realized by using a retrograde deep n-well as guard-ring structure and two analog counters whose layout has been optimized. By utilizing two different demodulation frequencies of 1.56 and 50 MHz, the two-tap sensor achieves a large depth range of 50 m with a relative depth uncertainty of 0.22% and a high 3-D frame rate of 65 frames/s. When using an optical bandpass filter and multi-frame accumulation, the sensor shows a tolerance of 120-klx sunlight. Compared with the previous iToF benchmarks, the proposed SPAD-based iToF sensor demonstrates the largest depth range without compromising the relative depth uncertainty.

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来源
《IEEE Journal of Solid-State Circuits》 |2021年第10期|2956-2967|共12页
作者
Byungchoul Park; Injun Park; Chanmin ParkWoojun ChoiYoondeok NaMyung-Jae LeeYoungcheol Chae;
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作者单位

Yonsei University, Seoul, South Korea;

Samsung Electronics, Hwaseong, South Korea;

Post-Silicon Semiconductor Institute, Korea Institute of Science and Technology (KIST), Seoul, South Korea;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类基本电子电路;
关键词
Single-photon avalanche diodes; Robot sensing systems; Uncertainty; Delays; Photonics; Demodulation; Vertical cavity surface emitting lasers;

A 64 × 64 SPAD-Based Indirect Time-of-Flight Image Sensor With 2-Tap Analog Pulse Counters

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