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首页> 外文期刊>Journal of optical technology >Portable mirror-surface profilometer
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Portable mirror-surface profilometer

机译:Portable mirror-surface profilometer

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摘要

A portable noncontact device was developed for determining the root-mean-square height of the microroughness of a mirror surface via light scattering. The instrument measures the diffuse and specular components of the sample reflectance. The minimum measured microroughness height was 2 nm. The mass of the optical unit of the device was <1 kg. (C) 2019 Optical Society of America

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