A technique for studying the three-dimensional structure of porous lead zirconate titanate films by FIB-SEM-nanotomography is presented. Such quantitative characteristics as total porosity, specific surface area, and actual pore size (calculated using the local thickness method) have been obtained. According to the FIB-SEM-nanotomography data, the pore size is 77 & PLUSMN; 33 nm for the film with the PVP porogen and only 27 & PLUSMN; 6 nm for the film with the Brij76 porogen; the latter value is close to the limiting resolution for this method. The final 3D model is shown to be strongly influenced by the chosen ion-beam parameters during milling, which can be varied to obtain a structure without distortion or visualize the accumulation of pores at grain boundaries.
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