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Study on dip error compensation model of laser displacement sensor and its application in measurement of spiral curved surface profile

机译：Study on dip error compensation model of laser displacement sensor and its application in measurement of spiral curved surface profile

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Featuring high resolution, excellent stability, great rapidity, and small size, the laser displacement sensor (LDS) has been extensively utilized in multiple domains. However, its accuracy is severely constrained by data acquisition (DAQ) errors. To solve this problem, we concentrate on the problem that DAQ errors seriously deteriorate the LDS measuring accuracy. Based on laser triangulation, we analyze the impact of laser beams and convergent spot centroid on the system measuring accuracy and establish mathematical models for quantitatively calculating LDS measured surface dip errors and charge-coupled device (CCD) dip errors. Further, these models can be used to compensate for the data collected by the LDS in real-time. Finally, experimental results show that after these two compensation models are used to correct measuring results, the accuracy of LDS-based DAQ is greatly improved, the measurement error is well controlled within 0.008 mm, and the LDS measuring accuracy on spiral curved surfaces is effectively boosted. (c) 2022 Society of Photo-Optical Instrumentation Engineers (SPIE)

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