A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure

Feng Xue; George Adedokun; Dongcheng XieRuichen LiuYan ZhangMustafa MuhammadLei XuFeng Wu

首页> 外文期刊>Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems >A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure

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A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure

机译：A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure

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摘要

A low-power multichannel metal oxide semiconductor (MOS) gas sensor device is presented, including a gas sensor with four gas detecting channels. The device adopts a T-shaped structure having a bridge-type single strip microheater along its horizontal axis, which also houses the four gas detecting channels. The device was designed and fabricated using MEMS technology with SnO2 deposited by sputtering as the sensing layer. Based on the temperature gradient of the microheater, at the same heating voltage, the device has a different temperature at each channel. Gas tests for four environmental air pollutants were carried out, and all four channels responded to H2, CO, NO2, and NH3 gases with a total power consumption of 21.92 mW. The responses characteristics of two sets of symmetrical channels are different under the same input heating voltage. The response change trend of each channel is also different with different target gas as the input heating voltage changes. [2021-0243]

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《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 |2022年第2期|275-282|共8页
作者
Feng Xue; George Adedokun; Dongcheng XieRuichen LiuYan ZhangMustafa MuhammadLei XuFeng Wu;
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作者单位

School of Microelectronics, University of Science and Technology of China, Hefei, China;

Hefei National Laboratory for Physical Sciences at the Microscale and the School of Microelectronics, University of Science and Technology of China, Hefei, China;

School of Information Science and Technology, University of Science and Technology of China, Hefei, China;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类微电子学、集成电路（IC）;
关键词
Gas detectors; Heating systems; Sensors; Sensor arrays; Electrodes; Temperature sensors; Gases;

A Low Power Four-Channel Metal Oxide Semiconductor Gas Sensor Array With T-Shaped Structure

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