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机译:Surface generation and materials removal mechanism in ultra-precision grinding of biconical optics based on slow tool servo with diamond grinding wheels
Harbin Inst Technol, Sch Mechatron Engn, Ctr Precis Engn, Harbin 150001, Peoples R China;
Biconical optics; Ultra-precision grinding; Slow tool servo; Surface topography; Materials removal mechanism; Single-crystal silicon;