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Development of a miniature objective based on calcium fluoride and zinc sulfide lenses for ultrafast laser microsurgery applications

机译:Development of a miniature objective based on calcium fluoride and zinc sulfide lenses for ultrafast laser microsurgery applications

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摘要

Calcium fluoride and zinc sulfide crystals exhibit broad multispectral transparency and are used for a multitude of optical applications. However, they both belong to a soft brittle crystal category and are mechanically challenging to process. Thus, a fabrication protocol using a single-point diamond turning method was developed, which can yield surfaces with optical quality for these materials. By using a diamond turning tool with low waviness (≤100-nm waviness) and by using feed rates of 1 and 0.2 μm/rev, CaF_2 and ZnS surfaces with surface roughness of 6 and 5 nm were manufactured, respectively. Design and fabrication of a miniature objective with 0.5 NA are also presented, which was developed for the ultrafast laser microsurgery application. The objective consists of CaF_2 and ZnS lenses to withstand the high power from ultra-short laser pulses and to provide a tightly focused beam with 1.23 μm 1/e~2 spot radius for laser ablation. Based on the spot size measurement of the objective, its performance was considered to be near diffraction limited.

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