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机译:Bidirectional CMOS-MEMS Airflow Sensor With Sub-mW Power Consumption and High Sensitivity
Shenzhen University;
Hong Kong University of Science and Technology;
Calorimetric flow sensor; complementary metal–oxide–semiconductor microelectromechanical systems (CMOS MEMS); high sensitivity; low power; thermoresistive; Sensitivity; Micromechanical devices; HVAC; Thermistors; Heating systems; Temperature sensors; Optical variables measurement;