机译:Enhancement of Transmitting Sensitivity of Piezoelectric Micromachined Ultrasonic Transducers by Electrode Design
Institute of Technological Sciences, Wuhan University, Wuhan, China;
Electrodes; Sensitivity; Aluminum nitride; Acoustics; III-V semiconductor materials; Shape; Scanning electron microscopy; Aluminum nitride (AlN); electrode design; microelectromechanical systems (MEMS); piezoelectric micromachined ultrasonic transducers (PMUTs); transmitting sensitivity;