In this paper, we propose a method for calculating multiple scattering of ions when passing through thin layers of titanium deuteride in the form of a sum of three Gaussian distributions, the dispersions of which are compared with increasing layer thickness and the found form of the angular distribution of multiple scattering is reduced to a single Gaussian distribution. When calculating single Rutherford scattering, we used only scattering without knocking out of the target atom from the crystal lattice. Scattering with the knocking out of the target atom from the lattice was taken into account by discrete elastic scattering.
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