机译:A Novel Coupled Piezoelectric Micromachined Ultrasonic Transducer Based on Piston Mode
Institute of Technological Sciences, Wuhan University, Wuhan, China;
Pistons; Bandwidth; Acoustics; Integrated circuit modeling; Resonant frequency; Transducers; Aluminum nitride; Crosstalk effect; high emission performance; piezoelectric micromachined ultrasonic transducers (pMUTs); piston mode; ultrawide frequency bandwidth;