Ultrathin Piezoelectric Resonators Based on Graphene and Free-Standing Single-Crystal BaTiO_3

Martin Lee; Johannes R. Renshof; Kasper J. van ZeggerenMaurits J. A. HoumesEdouard LesneMakars SiskinsThierry C. van ThielRuben H. GuisMark R. van BlankensteinGerard J. VerbiestAndrea D. CavigliaHerre S. J. van der ZantPeter G. Steeneken

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Ultrathin Piezoelectric Resonators Based on Graphene and Free-Standing Single-Crystal BaTiO_3

机译：Ultrathin Piezoelectric Resonators Based on Graphene and Free-Standing Single-Crystal BaTiO_3

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Suspended piezoelectric thin films are key elements enabling high-frequency filtering in telecommunication devices. To meet the requirements of nextgeneration electronics, it is essential to reduce device thickness for reaching higher resonance frequencies. Here, the high-quality mechanical and electrical properties of graphene electrodes are combined with the strong piezoelectric performance of the free-standing complex oxide, BaTiO_3 (BTO), to create ultrathin piezoelectric resonators. It is demonstrated that the device can be brought into mechanical resonance by piezoelectric actuation. By sweeping the DC bias voltage on the top graphene electrode, the BTO membrane is switched between the two poled ferroelectric states. Remarkably, ferroelectric hysteresis is also observed in the resonance frequency, magnitude and Q-factor of the first membrane mode. In the bulk acoustic mode, the device vibrates at 233 GHz. This work demonstrates the potential of combining van der Waals materials with complex oxides for next-generation electronics, which not only opens up opportunities for increasing filter frequencies, but also enables reconfiguration by poling, via ferroelectric memory effect.

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《Advanced Materials》 |2022年第44期|2204630.1-2204630.9|共9页
作者
Martin Lee; Johannes R. Renshof; Kasper J. van ZeggerenMaurits J. A. HoumesEdouard LesneMakars SiskinsThierry C. van ThielRuben H. GuisMark R. van BlankensteinGerard J. VerbiestAndrea D. CavigliaHerre S. J. van der ZantPeter G. Steeneken;
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Kavli Institute of Nanoscience Delft University of Technology Lorentzweg 1, Delft 2628 CJ, The Netherlands;

Department of Precision and Microsystems Engineering Delft University of Technology Mekelweg 2, Delft 2628 CD, The Netherlands;

Kavli Institute of Nanoscience Delft University of Technology Lorentzweg 1, Delft 2628 CJ, The Netherlands,Department of Precision and Microsystems Engineering Delft University of Technology Mekelweg 2, Delft 2628 CD, The Netherlands;

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正文语种英语
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2D materials; actuators; complex oxides; ferroelectrics; nanoelectromechanical systems; piezoelectrics; resonators;

Ultrathin Piezoelectric Resonators Based on Graphene and Free-Standing Single-Crystal BaTiO_3

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