Thin-film ferroelectric doped hafnia has emerged as a promising candidate for non-volatile computer memory devices due to its CMOS compatibility. The ferroelectricity in thin-film HfO2 is defined by the polar orthorhombic phase, whose stabilization depends on various parameters, such as doping species, stress, thickness, crystallization annealing temperature, etc. The concentration of oxygen vacancies is yet another parameter affecting the stabilization of the ferroelectric phase in HfO2 thin films. Here, we report on the effect of oxygen vacancies introduced in Y-doped HfO2 (HYO) films during reactive pulsed laser deposition on their ferroelectric properties, which we systematically study by correlating structural and electrical properties. Among different techniques, near-edge x-ray absorption fine structure analysis is successfully employed to distinguish between structurally similar ferroelectric orthorhombic and paraelectric tetragonal phases. It is shown that oxygen vacancies introduced at a certain concentration in HYO films can be used as a tool to control the phase composition as well as to decrease the formation energy (crystallization temperature) of the ferroelectric phase. Based on these results, we demonstrate a back-end-of-line compatible ferroelectric HYO capacitor device with competitive functional properties.
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