...
机译:Design and characterization of a pyroelectric detector based on three-dimensional structured hafnium oxide thin films
Fraunhofer-Institut fur Photonische Mikrosysteme IPMS (Germany);
Technische Univ. Chemnitz (Germany);
Fraunhofer-Institut fur Elektronische Nanosysteme ENAS (Germany)TU Dresden (Germany)InfraTec GmbH (Germany);
Sensors; Hafnium oxide; Silicon; Capacitance; Design and modelling; Pyroelectric detectors; Optical amplifiers;