We present a technique for enhancing the resolution of a two-dimensional detector by processing images that have been subsequently acquired shifted by a fraction of a pixel with respect to each other. Possible limitations due to the intrinsicspectral broadening of the actual signals and to sources of error in the procedure have been analyzed. The results prove that the reconstruction algorithm is insensitive to high uncertainties in the relative subpixel displacements of the single images and to a low signal-to-noise ratio. Experimental tests have been performed with a detector with pixel size 25×25μm{sup}2. Images of fine wire mesh grids with periods 100 and 50μm and of a 10-μm-wide slit are presented. The reconstructed images showimproved resolution of the profiles of the targets corresponding to 1/4-pixel sampling.
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