...
机译:A Flip-Chip Alignment System With the Property of Deviation Self-Correction at the Nanoscale
Guangdong Univ Technol, State Key Lab Precis Elect Mfg Technol & Equipmen, Guangzhou 510006, Peoples R China;
Corrector; flexure; flip-chip packaging; machine vision; piezoelectric (PZT) actuator;