机译:Orientation dependence of the fracture mechanisms in (V,AI)N coatings determined by micropillar compression
Rhein Westfal TH Aachen;
OXYNITRIDIC HPPMS-COATINGS; TRANSITION-METAL NITRIDES; MICRO-CANTILEVER; OXYGEN VARIATION; TOUGHNESS; HARD; BRITTLE; INDENTATION; EVOLUTION; STRENGTH;