In this paper we report the use of silicon bulk micromachining for inexpensive fabrication of miniature silicon springs used as sensing elements in a system for measurement of small mechanical moments. Such 'torsional microsprings' twist when mechanical moment is applied at the central part of the structure. The springs are designed and fabricated in a way where it is relatively easy to technologically control all geometrical dimensions in micrometer range. Further on, since the spring is made from silicon, the mechanical hysteresis is negligible, which is very important when measuring small moments. (C) 2000 Elsevier Science Ltd. All rights reserved. References: 6
展开▼
