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A dualhyphen;scan piezo element for scanning probe microscopes

机译:A dualhyphen;scan piezo element for scanning probe microscopes

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摘要

A simple method of achieving dual scan ranges with a single piezo element in scanning probe microscope instruments is described. Both highhyphen;resolution smallhyphen;scan ranges and lowhyphen;resolution largehyphen;scan areas are obtainable.

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