Dielectrophoretic assembly of lead zirconate titanate microtubes

Koval V.; Bharadwaja S.S.N.; Li M.Mayer T.S.Trolier-Mckinstry S.

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Dielectrophoretic assembly of lead zirconate titanate microtubes

机译：Dielectrophoretic assembly of lead zirconate titanate microtubes

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Lead zirconate titanate (PZT) microtubes were assembled onto pre-patterned substrates using dielectrophoresis of a colloidal suspension of microtubes dispersed in isopropyl alcohol. High aspect ratio tubes with an outer diameter of 2 μm and length of about 30 μm were prepared by vacuum infiltration of mesoporous silicon templates. An interdigitated electrode structure with gap sizes ranging from 2 μm to 15 μm was patterned on a silicon substrate via conventional lithography. This allowed a non-uniform alternating electric field to be generated. The influence of the electrode gap along with the effects of the waveform, amplitude and frequency of an applied signal on the dielectrophoretic assembly of PZT microtubes was investigated. A square wave signal of 5 V_(rms) and 10 Hz was found to be the most effective in assembling the microtubes on a 12 μm electrode gap. The results show potential for the dielectrophoretic technique in realizing integrated 3D devices using the high aspect ratio piezoelectric tube structures as building blocks

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《Solid State Communications》 |2011年第24期|1990-1993|共4页
作者
Koval V.; Bharadwaja S.S.N.; Li M.Mayer T.S.Trolier-Mckinstry S.;
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作者单位

Institute of Materials Research, Slovak Academy of Sciences, Watsonova 47, 043 53 Kosice, Slovakia;

Materials Research Institute, Pennsylvania State University, PA 16802, United States;

Electrical Engineering Department, Pennsylvania State University, PA 16802, United States;

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正文语种英语
中图分类固体物理学;
关键词
A. Ferroelectrics; B. Microtubes; D. Dielectrophoresis; E. Directed assembly;

Dielectrophoretic assembly of lead zirconate titanate microtubes

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