Thermochemical investigation of perspective MOCVD precursor of MgO functional layers: Bis-(trifluoroacetylacetonato)(N,N,N,N-tetramethylethylenediamine)magnesium(II)

Vikulova Evgeniia S.; Zherikova Kseniya V.; Sysoev Sergey V.Turgambaeva Asiya E.Trubin Sergey V.Morozova Natalia B.Igumenov Igor K.

首页> 外文期刊>Journal of thermal analysis and calorimetry >Thermochemical investigation of perspective MOCVD precursor of MgO functional layers: Bis-(trifluoroacetylacetonato)(N,N,N,N-tetramethylethylenediamine)magnesium(II)

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Thermochemical investigation of perspective MOCVD precursor of MgO functional layers: Bis-(trifluoroacetylacetonato)(N,N,N,N-tetramethylethylenediamine)magnesium(II)

机译：Thermochemical investigation of perspective MOCVD precursor of MgO functional layers: Bis-(trifluoroacetylacetonato)(N,N,N,N-tetramethylethylenediamine)magnesium(II)

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This paper presents a reliable and useful thermochemical information on a mixed-ligand magnesium complex with trifluoroacetylacetonate (tfac) and N,N,N,N-tetramethylethylenediamine (tmeda), Mg(tmeda)(tfac)(2), as low melting and highly volatile precursor for metal-organic chemical vapor deposition. New vapor pressure data for sublimation and vaporization processes were obtained by Knudsen effusion and transpiration methods, respectively, giving the corresponding molar enthalpies and entropies: H-sub(328.0)=106.2 +/- 3.1kJmol(-1) and S-sub degrees(328.0)=224.8 +/- 9.6JK(-1)mol(-1), H-vap(385.5)=71.5 +/- 1.4kJmol(-1) and S-vap degrees(385.5)=131.6 +/- 3.8JK(-1)mol(-1). Based upon these new results, the sublimation data obtained previously by transpiration method were re-treated giving the following thermodynamic characteristics of sublimation: H-sub(345.5)=106.4 +/- 1.0kJmol(-1) and S-sub degrees(345.5)=227.4 +/- 2.8JK(-1)mol(-1). The thermal behavior of the precursor vapor on the heated surface in vacuum was investigated by in situ mass spectrometry in the temperature range (353-773) K. A two-step dissociation of the complex molecule was established, while no complete decomposition to form the inorganic phase was observed without reagent gases. Thermodynamic simulation of the solid phase formation from the gaseous mixture of the precursor and oxygen or water as co-reagents in Mg-O-F-C-N-H system was carried out within wide range of the deposition temperature, total pressure and reagent molar ratio in order to determine the conditions of obtaining pure MgO films.

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《Journal of thermal analysis and calorimetry》 |2019年第3期|923-930|共8页
作者
Vikulova Evgeniia S.; Zherikova Kseniya V.; Sysoev Sergey V.Turgambaeva Asiya E.Trubin Sergey V.Morozova Natalia B.Igumenov Igor K.;
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Russian Acad Sci, Siberian Branch, Nikolaev Inst Inorgan Chem, 3 Acad Lavrentiev Ave, Novosibirsk 630090, Russia;

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正文语种英语
中图分类物理化学（理论化学）、化学物理学;
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Magnesium; MOCVD precursor; Vapor thermolysis; Vapor pressure; Transpiration method; Knudsen effusion method;

Thermochemical investigation of perspective MOCVD precursor of MgO functional layers: Bis-(trifluoroacetylacetonato)(N,N,N,N-tetramethylethylenediamine)magnesium(II)

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