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Optimizing poly(chloro‐p‐xylylene) or parylene C synthesis

机译:Optimizing poly(chloro‐p‐xylylene) or parylene C synthesis

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AbstractCurrent interest for implantable insulating biomaterials has resurrected a class of polymers synthesized fromp‐xylylene and its derivative dimers. Important kinetic aspects for the synthesis of the polymer are derived from measurements of chamber pressure and total weight of film deposition. Reduction of peak chamber pressure during polymer deposition was found to improve film quality, uniformity of deposit, adhesion, and transparency. A low‐cost reactor design is proposed which simplifies the deposition characterization steps needed for producing high quality fi

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