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Optomechanical design and fabrication of resonant microscanners for a scanning fiber endoscope

机译：Optomechanical design and fabrication of resonant microscanners for a scanning fiber endoscope

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Scanning fiber optical endoscopy shows promise as a small, inexpensive imaging tool. Using this method of image acquisition, a scanning fiber is actuated at mechanical resonance, projecting a light spot across an imaged surface. Light backscattered from scanned spots is measured to form an image. The acquired image field of view, resolvable pixels, and frame rate are dependent on the dynamics of the optical fiber used as a resonant scanner. A finite-element analysis (FEA) model was constructed to predict scanning fiber dynamics, and compared with experimental results. A scanning fiber microfabrication process was developed that allows for the controlled manufacture of fiber scanners. Experimental results confirm that the theoretical model was accurate in predicting the system transfer function with less than 6percent error in amplitude and less than 10percent error in resonant frequency at the first two resonant modes of a cylindrical and a microfabricated fiber. The scanning fiber microfabrication process proved to be capable of repeatably etching notches in optical fibers as small as 2.00+-0.05 mm in length and 15+-2 (mu)m in diameter. FEA was used to predict the effect of geometry change on microfabricated fiber scan dynamics, yielding candidate designs chosen for enhanced performance of future scanning endoscopes.

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