Apertureless Scanning Near-field Optical Microscope (SNOM) receives an increasing interest in local imaging and analysis. We report a hybrid microscope composed of a commercial Atomic Force Microscope (AFM) and an apertureless SNOM, whichoperates both in reflection and transmission modes with several illumination and collection systems. The optical probe is a commercial AFM tip integrated on a silicon cantilever. The AFM is operated in the intermittent contact mode at the resonancefrequency of the cantilever. We present the images obtained on a grating of cylindrical dots of aluminum (diameter is 200 nm, height is 20 nm) and we show the effects of some optical parameters (polarization, direction of illumination and collection) onthe SNOM images.
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