A simple method of alignment correction and evaluation of incidencehyphen;angle change for a laser ellipsometric monitor is presented. Once the alignment is out of order after accurate adjustment, it is corrected by an automatic alignment correction system. The system moves an analyzer assembly with aXhyphen;Ztranslation stage so as to adjust the center of the entrance aperture to the reflected laser light from a specimen. Incidencehyphen;angle change is evaluated from the length of the movement. Performance of the system has been tested and the result was that the error was not more than 0.01deg; for an incidencehyphen;angle change and 0.1deg; for psgr; and Dgr;.
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