Femtosecond pulsed laser direct writing system

Krishnan Venkatakrishnan; B. Tan; Paul StanleyL. E. N. LimBryan Kok Ann Ngoi

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Femtosecond pulsed laser direct writing system

机译：Femtosecond pulsed laser direct writing system

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摘要

Laser writing using conventional lasers has found widespread application in the fabrication of electronic components and the repair of integrated circuits. However, due to large thermal damage associated with the laser ablation process, these lasers are not suitable for microelectronic components with submicron feature size. To address these issues, a novel system is introduced for laser direct writing using femtosecond lasers. Here, an acousto-optic deflector-based scanning system has been developed for steering the femtosecond laser beam with high positional accuracy, resolution, and scan speed. The capability of the system to machine complex features with submicron line widths has been proved. This system has profound potential application in the electronic and microfabrication industry.

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来源
《Optical Engineering》 |2002年第6期|1441-1445|共5页
作者
Krishnan Venkatakrishnan; B. Tan; Paul StanleyL. E. N. LimBryan Kok Ann Ngoi;
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作者单位

Nanyang Technological University Precision Engineering and Nanotechnology Centre School of Mechanical and Production Engineering Nanyang Avenue 639798 Singapore;

Department of Applied Physics and Advanced Technologies (FATA), National Autonomous University of Mexico, A.P. 1-1010, Queretaro, Qro. 67000, Mexico;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
关键词
laser writing; femtosecond laser; acoustic-optic deflectors;

Femtosecond pulsed laser direct writing system

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