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机译:A Single-Chamber System of Initiated Chemical Vapor Deposition and Atomic Layer Deposition for Fabrication of Organic/Inorganic Multilayer Films
Korea Adv Inst Sci & Technol, Dept Chem & Biomol Engn, 291 Daehak Ro, Daejeon 34141, South Korea;
Elect & Telecommun Res Inst, Flexible Informat Device Res Sect, 218 Gajeong Ro, Daejeon 34129, South Korea;
Elect & Telecommun Res Inst, Smart IO Platform Res Dept, 218 Gajeong Ro, Daejeon 34129, South Korea;