An experimental system has been designed and built to comprehensively study the electrical and plasma characteristics in symmetric capacitively coupled rf discharges at low gas pressures. Descriptions of the system concept, the discharge chamber, the vacuumhyphen;gas control system, and the rf matching and electrical measurement system are presented together with some results of electrical measurements carried out in an argon discharge at 13.56 MHz. The system has been specifically designed to facilitate external discharge parameter measurements and probe measurements and to be compatible with a wide variety of other diagnostics. External electrical measurements and probe measurements within the discharge show that it is an ideal vehicle to study lowhyphen;pressure rf discharge physics. Measurements from this system should be comparable to onehyphen;dimensional rf symmetric capacitive discharge theories and may help to verify them. Although only a few results are given here, the system has been operated reliably over a wide range of gas pressures and should give reproducible and accurate results for discharge electrical characteristics and plasma parameters over a wide range of driving frequency and gas components.
展开▼
