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机译:A Micromachined Quartz Resonator Array for Biosensing Applications
Department of Electrical Engineering, Pennsylvania State University;
Otto-von-Guericke-University Magdeburg, TEPROSA;
Department of Electrical Engineering and Information Technology and the Institute of Micro and Sensor Systems, Otto-von-Guericke-University MagdeburgDepartment of Chemistry and the Materials Research Institute, Pennsylvania State UniversityInstitute of Micro and Sensor Systems, Otto-von-Guericke-University Magdeburg;
Biosensor array; Impedance spectrum analyzer; Quartz crystal microbalance (QCM); Quartz micromachining;