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机译:New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films
Laboratoire Science et Ingenierie des MAteriaux et des Precedes, Universite Joseph Fourier;
Universite catholique de Louvain;
Northwestern University;
Mechanical properties; Microelectromechanical systems (MEMS); MEMS test structures; Nanomechanical testing; Release; Size effect; Thin materials;