AbstractA study has been made on the plasma polymerization of styrene monomer in a cold, low‐power, inductively coupled RF plasma. Styrene monomer yielded an insoluble, crosslinked film which was slightly colored. A kinetic study is reported for styrene. The effects of power level, bleed rate of monomer, pressure, and reactor geometry on the rate of polymer formation are reported. A mechanism is postulated for plasma polymerization. It was found that the initiation step was the rate controlling step and that the reaction followed a cationic polymerization scheme. Both crosslinking and discoloration of the polymers occur at the time of polymerization and are not a result of exposure of the reacted polymer to the plasma. The polymerization was shown to take place in the bulk phase as well as on the reaction wall surface
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