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Realhyphen;time, highhyphen;resolution optical beam positionhyphen;sensing device

机译:Realhyphen;time, highhyphen;resolution optical beam positionhyphen;sensing device

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摘要

An optical beam positionhyphen;sensing device with realhyphen;time and highhyphen;resolution abilities is described using a Pb2CrO5thinhyphen;film lateral photodetector. A high resolution of less than 5 nm in an effective measuring range of 16 mgr;m is compatible with a realhyphen;time response of up to 10 kHz. Three parallel, planar gold electrodes evaporated on the film surface in a configuration with two narrow electrode gaps are essential for sensing the position of a light beam. Relationships between photocurrent and light beam position are examined under various combinations of the electrode configuration and beamwidths. The displacement deviation at the surface of the shaft of the rotating motor is measured for a demonstration of realhyphen;time and highhyphen;resolution position sensing.

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