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机译:Magnetic Field Improvement in End Region of Rectangular Planar DC Magnetron Based on Particle Simulation
[Qiu, QQ;
Li, QF;
Su, JJ] Xian Jiaotong Univ, Dept Elect Engn, Xian 710049, Peoples R China[Jiao, YFinley, J] Penn Pittsburgh Glass Ind Inc, Glass R&D Ctr, Pittsburgh, PA 15238 USA;
magnetron sputtering; plasma; magnetic field; erosion; particle simulation; CARLO SIMULATION; DISCHARGE; PLASMA; EROSION; SYSTEM;