Moving Polymer Waveguides and Latching Actuator for 2 × 2 MEMS Optical Switch

Hao-Bing Liu; Franck Chollet

首页> 外文期刊>Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems >Moving Polymer Waveguides and Latching Actuator for 2 × 2 MEMS Optical Switch

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Moving Polymer Waveguides and Latching Actuator for 2 × 2 MEMS Optical Switch

机译：Moving Polymer Waveguides and Latching Actuator for 2 × 2 MEMS Optical Switch

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摘要

We describe a novel type of MEMS optical switch based on moving waveguide which has merits inherited from both MEMS and integrated optics technologies. It provides an expandable 2×2 switching capability, a first in this category of switches. The switch is built by assembling independently optimized latching silicon actuator and soft polymer waveguides. The actuator is based on two new structures: a microhinge, dubbed the fork hinge, and a latching structure using a precompressed microspring. The mechanical switching speed was measured below 0.5 ms. The complex polymer waveguide structure was thoroughly characterized to obtain all the components of the optical loss. This analysis allowed us to estimate robustly the insertion loss of the assembled optical switch below 3 dB and to identify the possibilities to improve this figure.

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《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 |2009年第3期|715-724|共10页
作者
Hao-Bing Liu; Franck Chollet;
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作者单位

MicroMachines Centre, School of Mechanical and Aerospace Engineering, Nanyang Technological University;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类自动化系统;微电子学、集成电路（IC）;
关键词
Microelectromechanical systems (MEMS); Optical switch; Waveguide;

Moving Polymer Waveguides and Latching Actuator for 2 × 2 MEMS Optical Switch

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