A compact, low-height prototype of a six-axis precise positioning stage for microfabrication has been developed. X and Y stage positioning requires nanometer positioning resolution and robustness against atmospheric turbulence. The stiffness and dead play of the traveling mechanism were improved by using rolling contact guides, and the positioning resolution was improved by using a friction drive mechanism. Analog signals from an optical linear scale are influenced little by atmospheric turbulence. Using these advantages of the optical linear scale and with a newly developed positioning algorithm, one-nanometer resolution was obtained.
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