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Hysteresis and vibration compensation for piezoactuators

机译:Hysteresis and vibration compensation for piezoactuators

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摘要

Structural vibrations and hysteresis nonlinearities in piezoactuators have been fundamental limitations when using these actuators for high-speed precision-positioning applications. Positioning speed (bandwidth) is limited by structural vibrations, typically, to about one tenth the fundamental vibrational frequency of the piezoprobe. Further, precision in positioning is limited by hysteresis nonlinearities, which can result in significant errors for large-range positioning applications. This paper shows that significant improvements in precision and bandwidth can be achieved by using an inversion-based approach to compensate for hysteresis and vibrations in the piezodynamics. The approach decouples the inversion into 1) inversion of the hysteresis nonlinearity and 2) inversion of the structural dynamics, to find an input voltage profile that achieves precision tracking of a desired position trajectory The approach is applied to a piezoactuator, and experimental results show that an order of magnitude improvement in positioning speed is achieved, while maintaining precision tracking of the desired position trajectory. References: 29

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