Fabrication of waveguide devices by UV photopatterning of fluorinated poly(arylene ether ketone)s containing tetrafluorostyrol moieties

Jia Jiang; Claire L. Callender; Julian P. NoadYinghua QiJianfu DingMichael Day

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Fabrication of waveguide devices by UV photopatterning of fluorinated poly(arylene ether ketone)s containing tetrafluorostyrol moieties

机译：Fabrication of waveguide devices by UV photopatterning of fluorinated poly(arylene ether ketone)s containing tetrafluorostyrol moieties

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摘要

This work demonstrates waveguide devices based on a novel photocrosslinkable fluorinated poly(arylene ether ketone). A new molecular design has enabled waveguide fabrication to be achieved for the first time using this kind of polymer, through direct UV patterning and a wetetch process, which is faster and more convenient and economical than the process based on standard reactive-ion etching that has been applied to previously reported poly(arylene ether ketone) materials. High-quality waveguides with smooth, well-defined sidewalls have been produced, and optical splitter devices based on directional coupling are demonstrated. Optical characterization of these devices suggests that the waveguide quality is comparable to that of waveguides fabricated using a dry-etch process, and the experimental data obtained from the fabricated optical splitters are in excellent agreement with theoretical predictions.

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来源
《Optical Engineering》 |2007年第7期|074601-1-074601-7-0|共7页
作者
Jia Jiang; Claire L. Callender; Julian P. NoadYinghua QiJianfu DingMichael Day;
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作者单位

Communications Research Centre Canada, P.O. Box 11490, Station H, Ottawa, Ontario, Canada, K2H 8S2;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类光学仪器;
关键词
fluorinated poly(arylene ether ketone); photopatterning; wet etching; waveguide; directional coupler;

Fabrication of waveguide devices by UV photopatterning of fluorinated poly(arylene ether ketone)s containing tetrafluorostyrol moieties

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