Elastic Averaging for Assembly of Three-Dimensional Constructs From Elastomeric Micromolded Layers

Theodore C. Marentis; Joseph P. Vacanti; James C. HsiaoJeffrey T. Borenstein

首页> 外文期刊>Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems >Elastic Averaging for Assembly of Three-Dimensional Constructs From Elastomeric Micromolded Layers

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Elastic Averaging for Assembly of Three-Dimensional Constructs From Elastomeric Micromolded Layers

机译：Elastic Averaging for Assembly of Three-Dimensional Constructs From Elastomeric Micromolded Layers

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摘要

Precision engineering has been used in the macro-world and in the microscale only with rigid materials. Soft flexible materials commonly used for microfluidics and other bio-MEMS applications have not been aligned with elastic averaging. We report the use of complementary raised and recessed circular features to align polymer layers and demonstrate alignment accuracy and repeatability. The alignment is accomplished in a Petri dish with a thin layer of liquid between the two surfaces of micro-molded elastomeric polymer sheets. The layers are aligned with simple hand-eye manipulation. We test circular geometries of varying diameters, obtaining accuracy and repeatability values in the range of 1-3 μm across thin polymer sheets molded from silicon masters. This is a significant improvement over existing manual, moving stage, and self-alignment techniques and a novel proof of concept that paves the way for complex 3-D polymer constructs.

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《Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems》 |2009年第3期|531-538|共8页
作者
Theodore C. Marentis; Joseph P. Vacanti; James C. HsiaoJeffrey T. Borenstein;
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作者单位

Harvard-MIT Division of Health Sciences and Technology;

Center for Regenerative Medicine, Massachusetts General Hospital;

Charles Stark Draper Laboratory;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种英语
中图分类自动化系统;微电子学、集成电路（IC）;
关键词
Alignment; Biomedical engineering; Elastic averaging; Lab-on-a-chip; Microassembly; Microfluidics; Micromachining; Poly-(dimethylsiloxane) (PDMS); Precision engineering; Silicone rubbers; Surface fitting; Tissue engineering;

Elastic Averaging for Assembly of Three-Dimensional Constructs From Elastomeric Micromolded Layers

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