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KOR negative photoresist in integrated optics

机译:KOR negative photoresist in integrated optics

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摘要

Tests on Kodak Ortho Resist (KOR) have been made for application to integrated optics. This material is interesting with respect to other photoresists for its high sensitivity over a wide wavelength range. Optical waveguides and gratings have been realized with KOR. In particular gratings with high frequency have been used to test the possibility of air-film coupling via their evanescent diffracted waves.

著录项

  • 来源
    《optical and quantum electronics》 |1975年第6期|447-450|共页
  • 作者

    G.-C.Righini; V.Russo; S.Sottini;

  • 作者单位

    Instituto di Ricerca sulle Onde Elettromagnetiche del CNR;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 英语
  • 中图分类
  • 关键词

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