A wide aperture, X-ray pre-ionized discharge pumped excimer laser was comparatively studied as oscillator and amplifier with XeCl and KrF as the active gases. With XeCl (KrF), an oscillator output energy of 3J (1 J) and a small-signal gain coefficient of 11cm−1(6cm−1) were measured. The beam size was 6×5 cm2. For smaller beam widths (obtained by limiting the pre-ionized region), both excimers showed considerably higher gain. The dependence of output parameters on the X-ray dose was studied for both exci
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