We present a novel method for fabricating microlens mold arrays. The mold array is fabricated using focused-ion-beam milling (FIBM) on a substrate of bulk SI. The 2-D profiles and surface roughnesses of the fabricated molds are measured using a laser interferometer. Finally, the mold array is used for hot embossed molding. The surface roughnesses of the mold and the replica are 2.5 and 8 nm, respectively. We define surface roughness as the arithmetic mean of the absolute departure of the roughness profile from the mean line. A profile of the replica is acceptable for practical use. The measured size of the replica corresponds well with that of designed array.
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